
The Vacuum Linear Guide is a stainless steel linear motion component designed for vacuum systems, cleanroom equipment, semiconductor machinery and other applications where low outgassing, cleanliness and stable linear motion are required.
The guide rail and moving components can be manufactured with stainless steel and all-metal configurations to reduce the use of polymer components that may release volatile substances in vacuum environments. The design provides smooth linear movement, high rigidity and reliable performance under demanding operating conditions.
Key Features
Designed for Vacuum Environments
Suitable for linear motion systems operating under vacuum and reduced-pressure conditions.
01
Stainless Steel Construction
Stainless steel components provide corrosion resistance, structural stability and long-term durability.
02
Low-Outgassing Design
All-metal configurations can minimize the use of materials that may release volatile substances in vacuum environments.
03
High Cleanliness
Suitable for equipment where particle generation and material contamination need to be controlled.
04
Smooth Linear Motion
Precision-ground raceways and optimized rolling contact help provide stable and low-friction movement.
05
High Rigidity
The rigid guide structure supports stable positioning and repeatable linear movement.
High-Temperature Options
High-temperature configurations are available for equipment combining vacuum and elevated-temperature operating conditions.
Product Specifications
|
Parameter |
Specification |
|
Product Type |
Vacuum Linear Guide |
|
Guide Rail Material |
Stainless Steel |
|
Slider Material |
Stainless Steel / Customized |
|
Structure |
Stainless Steel / All-Metal Options |
|
Vacuum Environment |
Available for Vacuum Applications |
|
Operating Temperature |
Up to 150°C* |
|
Rail Length |
Customized |
|
Guide Size |
Multiple Sizes Available |
|
Customization |
OEM / ODM Supported |
*Actual temperature and vacuum performance depend on the selected material, lubrication, sealing configuration and operating conditions.
Conventional linear guides may use polymer end caps, retainers, seals or lubricants that are not suitable for certain vacuum environments. The Vacuum Linear Guide is designed to address these requirements through material selection, structural optimization and vacuum-compatible configurations.
Depending on the application, JSM can provide stainless steel or all-metal configurations to help reduce outgassing and maintain stable motion in controlled environments.

01
Semiconductor Equipment
Used for wafer handling, inspection and positioning systems where cleanliness, precision and low contamination are important.
02
Vacuum Processing Equipment
Suitable for vacuum chambers, vacuum furnaces and other equipment requiring reliable linear movement under reduced pressure.
03
Cleanroom Automation
Designed for automated equipment operating in controlled environments where particle generation and material compatibility are key considerations.
04
Precision Positioning Equipment
Used in inspection, measurement and other precision systems requiring stable and repeatable linear movement.
Material & Structural Options
Different vacuum applications have different requirements for corrosion resistance, temperature resistance, cleanliness and load capacity. JSM provides multiple material and structural options according to equipment requirements.
Stainless Steel Guide Rail
Provides corrosion resistance and mechanical stability for demanding industrial environments.
All-Metal Configuration
An all-metal structure can reduce polymer components and is suitable for applications where low outgassing and high cleanliness are required.
Vacuum-Compatible Lubrication
Lubrication can be selected according to vacuum level, temperature and operating conditions to help maintain smooth movement and service life.
Why Choose JSM for Vacuum Linear Guides?
Stainless Steel Manufacturing
Stainless steel linear guides are one of JSM's core product categories, with material options including 440C, 304 and 316L for different application requirements.
Customized Engineering
We support customized rail lengths, dimensions, materials, surface treatments and OEM/ODM requirements for different linear motion systems.
Precision Manufacturing
Precision grinding, CNC machining and inspection processes are used to maintain consistent guide rail and slider quality.
Global B2B Supply
JSM provides linear motion components to industrial customers and supports sample orders, customized production and long-term supply.
FAQ
What material is used for the Vacuum Linear Guide?
Stainless steel is commonly used for the guide rail and moving components. Depending on the application, JSM can provide different stainless steel and all-metal configurations.
Can this linear guide be used in high-temperature vacuum equipment?
Yes. High-temperature configurations are available for applications combining vacuum and elevated temperatures. The actual operating temperature should be confirmed according to the selected material, lubrication and component configuration.
Can you customize the Vacuum Linear Guide?
Yes. JSM supports customization of rail length, dimensions, mounting holes, materials, preload, lubrication and other specifications according to equipment requirements.
What information should I provide for selection?
For a suitable Vacuum Linear Guide, buyers should provide the required vacuum level, operating temperature, load, stroke, travel speed, installation dimensions and lubrication requirements. Our engineering team can recommend a suitable configuration based on these parameters.
Hot Tags: vacuum linear guide, China vacuum linear guide manufacturers, suppliers, factory, stainless linear guide, stainless steel guide rails


